Methods for model generation and parameter extraction for MEMS

A strategy for compact modeling is presented, that takes into account the specific problems associated with the development and production of microelectromechanical devices and systems (MEMS). For a MEMS compact model, a set of basis functions is derived from a continuous field model description by proper approximations. This set should represent all relevant coupling effects that determine the device operation, and the most important parasitic effects. The remaining less important effects arc taken into account by means of data fitting. The corresponding model parameter extraction process uses direct extraction techniques and well tuned local optimization steps for those parameters of the basis functions, which represent physical, technological or geometrical properties. Local and global optimization steps are used to determine the remaining fit parameters. This results in an effort-optimized modeling approach, which is suitable for statistical modeling and yield analysis, and can be automated in a CAD-toolset.